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Hall test System HSPM-05PS at room temperature probe table with permanent magnet

Hall test System HSPM-05PS at room temperature probe table with permanent magnet

The HSPM-05PS Room temperature Probe Hall test system provides a vertical magnetic field environment for 8 inch samples and devices to be tested。Using porous partition control gas adsorption fixation, can automatically control the forward and backward movement of permanent magnet and N.The S-pole flips, and can be accurately positioned, and the magnetic field size is 0.5T 。

Permanent magnet Room temperature probe table Hall test System HSPM-05PS product overview

The HSPM-05PS room temperature probe table Hall test system can provide a fixed magnetic field test environment for precision small (nanometer) microelectronic devices, magnifying the tested sample through a microscope, needle insertion with a high-precision microprobe, and Hall test and analysis with an external Hall measuring instrument。 

The HSPM-05PS Room temperature Probe Hall test system provides a vertical magnetic field environment for 8 inch samples and devices to be tested。External connection Other electrical meters can perform non-destructive electrical testing of chips, wafers and devices at room temperature, such as current, voltage, resistance and other electrical signals under different magnetic fields。


System features:

• Stable dual displacement adjustment system to adjust the displacement of the sample seat and probe arm 
• The sample holder can hold 8-inch wafer samples and is secured by controlled gas adsorption using porous partitions。 
• Can automatically control the forward and backward movement of permanent magnet and N.The S-pole flips, and can be accurately positioned, and the magnetic field size is 0.5T 
• 6 probe arms can be mounted 
• The probe arm adopts magnet adsorption, can be moved arbitrarily, and can be fine-tuned in three dimensions for easy operation, precise needle insertion, the probe of the four probe arms can be inserted into any position of the sample。 
• The probe arm adopts three coaxial cables and three coaxial connectors, and the leakage current is small, within 100fA 
•CCD magnification is 180 times, working distance is 100mm


Test materials:

• Thermoelectric materials: bismuth telluride, lead telluride, silicon germanium alloy, etc
• Photovoltaic materials/solar cells: (A-silicon (monocrystalline silicon, amorphous silicon), CIGS (copper indium Gallium selenium), cadmium telluride, perovskite, etc.)
• Organic materials: (OFET, OLED)
• Transparent conductive metal oxide TCO: (ITO, AZO, ZnO, IGZO (Indium gallium zinc oxide), etc.)
• Semiconductor materials: SiGe, InAs, SiC, InGaAs, GaN, SiC, InP, ZnO, Ga2O3, etc
• 2D materials: graphene, BN, MoS2, etc



Technical parameters of Hall test system HSPM-05PS on permanent magnet room temperature probe table

Parameters and indicators:

Standard resistance range
10 m Ω Ω - 100 g
mobility
10-2-106cm2/VS
Carrier concentration
8x102-8x1023/cm3
Hall voltage
The resolution is 1μV
Voltage excitation range
100nV ~ 10V
Current excitation range
10pA ~ 100mA
Test method
Vanderbilt or Holba
Sample size
200mm
Sample contact mode
The three dimensional fine displacement probe arm needling can satisfy the minimum needling requirement of 3μm electrode
Sample temperature
室温
Sample environment
Atmosphere, nitrogen atmosphere is optional
磁场
0.5T
Field control system
Electric displacement and turnover
Magnet gap
30mm
Field uniform region
10mm*10mm*10mm is better than 5%

Permanent magnet room temperature probe table Hall test system HSPM-05PS application field

semiconductor
Integrated circuit
wafer

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