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65K closed cycle low temperature probe PSM-65K series

65K closed cycle low temperature probe PSM-65K series

PSM-65K low temperature probe, using small low vibration closed cycle refrigeration, no need to consume liquid helium, temperature 65K, vibration less than 1μm, wide test temperature range, support 65K-350K continuous temperature change, small power consumption, input power 320W。

65K closed cycle low temperature probe PSM-65K series product overview

  Low temperature probe station plays a vital role in scientific research and technology development。It can perform a variety of non-destructive physical and electrical properties tests on samples at low temperatures, helping researchers to deeply understand the various physical and electrical properties of materials or devices, so as to provide important data support for the development and application of new materials。


  The PSM-65K cryogenic probe is an economical and compact closed cycle cryogenic probe,Its compact and low vibration design,It can provide a < 65K-350K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips,Through the external connection of different electrical measuring instruments,Can complete material/device IV, CV, optical and microwave parameters detection,Enables non-destructive electrical testing of chips, wafers and devices in low temperature vacuum environments。


System features:

• Small low vibration closed cycle refrigeration, no need to consume liquid helium, temperature 65K。
• Vibration less than 1μm。
• Wide test temperature range, support 65K-350K continuous temperature change。
• Low power consumption, input power 320W。
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different components on the sample to be switched for testing without destroying the vacuum。
• Unique probe arm X-Y-Z-R four-dimensional adjustment for 4-inch sample testing。
• The probe arm adopts a triaxial connector with good leakage performance and measured leakage current less than 100fA@1V@65K-350K。
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test。

65K closed cycle low temperature probe PSM-65K series technical parameters

Parameters and indicators

Probe station host classification
型号PSM-65K-2
PSM-65K-4
Temperature range
65K-350K
Temperature control stability
+/-50mK
振动
<1μm
Specimen holder
Types and materials
Oxygen free copper ground gold plated sample holder
尺寸
2寸
4寸
Optional configuration

Insulated sample holder (temperature only up to 400K)

Coaxial sample holder (temperature only up to 400K)

 Triaxial sample holder (temperature only up to 400K)

Probe arm
类型
Dc probe arm
数量
4
Connectors and cables
Three coaxial connectors + very thin coaxial low-temperature cable
Leakage current
100fA@1V In a vacuum
Signal frequency
DC--50MHz
Matched impedance
50欧姆
Displacement rangeX+/- 35mm,Y+/- 12.5m,Z +/-6.5m R+/-10°
X+/- 50mm,Y+/- 12.5m,Z +/-6.5m R+/-10°
Optical system
Microscope magnification
10--180倍
Resolution
3微米
视场
22mm
Working distance
90--100mm
Vacuum chamber
材料
Aluminium alloy
Cavity volume
4L
5.5L
Overall size
800*800*600
900*900*600
Intracavitary diameter
124mm
155mm
Window size
50mm
100mm
Vacuum chamber window
Standard quartz window
Radiation screen window
Infrared absorption window
Vacuum degree
5E-4 torr
Reserved interface
2 probe arm interfaces&2 electrical interfaces
Radiation shielding material
Stainless steel
Cooling time
60 minutes to 77K
100 minutes to 77K
冷源
Sterling refrigerator
Special vibration isolation
尺寸
800*800*800
900*900*800
桌推
Fixed foot&滚轮

65K closed cycle low temperature probe PSM-65K series of applications

semiconductor
Integrated circuit
wafer

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