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4K closed cycle low temperature probe PSM-4K series

4K closed cycle low temperature probe PSM-4K series

The PSM-4K series low temperature probe is a closed cycle low temperature probe,Compact and low vibration design,It can provide a < 5K-350K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips,Through the external connection of different electrical measuring instruments,Can complete material/device IV, CV, optical and microwave parameters detection,Enables non-destructive electrical testing of chips, wafers and devices in low temperature vacuum environments。

4K closed cycle low temperature probe table PSM-4K series product overview


  4K closed cycle cryoprobe station plays a vital role in scientific research and technology development。It can perform a variety of non-destructive physical and electrical properties tests on samples at low temperatures, helping researchers to deeply understand the various physical and electrical properties of materials or devices, so as to provide important data support for the development and application of new materials。


  PSM-4K series low temperature probe is a superior performance of closed cycle low temperature probe, its compact and low vibration design, can provide a < 5K-350K high and low temperature vacuum test environment for semiconductor chip electrical parameter testing。Closed cycle refrigeration, no need to consume liquid helium, temperature 4.5K。


特点
• Closed cycle refrigeration, no need to consume liquid helium, temperature 4.5K。
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different components on the sample to be switched for testing without destroying the vacuum。
• Unique probe arm X-Y-Z-R four-dimensional adjustment for 4-inch sample testing。
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test。
• The probe arm adopts a triaxial connector with good leakage performance and measured leakage current less than 100fA@1V@4.5K-350K。
• Wide test temperature range, support 4.5K-350K continuous temperature change。
• Uniquely designed flexible probe, which is mounted on copper shrapnel to avoid sample or electrode damage due to excessive force during needle insertion。

4K closed cycle low temperature probe PSM-4K series technical parameters

Parameters and indicators:

Probe station host classification
型号
PSM-4K-2
 PSM-4K-4
Temperature range
4.5K--350K
4.5K--350K
Temperature control stability
+/-50mK
振动
<1μm
Specimen holder
Types and materials
Oxygen free copper ground gold plated sample holder
尺寸2寸4寸
Optional specifications
Insulated sample holder (temperature only up to 350K)
Coaxial sample holder (temperature only up to 350K)
 Triaxial sample holder (temperature only up to 350K)
Probe arm
类型
Dc probe arm (Standard)
Optional specificationsMicrowave probe arm, fiber probe arm
Specifications can be customized
                             Dual fiber probe arm, DC and microwave combined probe arm, thermocouple probe arm
数量4 (standard), up to 6
Connectors and cables
Three coaxial connectors + very thin coaxial low-temperature cable
Leakage current
100fA@1V In a vacuum
Signal frequency
DC--50MHz
Matched impedance
50欧姆
Displacement rangeX+/- 35mm,Y+/- 12.5mm 
Z +/-6.5mm R+/-10°
X+/- 50mm,Y+/- 12.5mm 
Z +/-6.5mm R+/-10°
Optical system
Microscope magnification
10--180倍
Resolution
3微米
视场
22mm
Working distance
90--100mm
Vacuum chamber
材料
Aluminium alloy
Cavity volume
9L
12L
Overall size
900*900*600
900*900*600
Intracavitary diameter
 280mm
 280mm
Window size
 50mm
 100mm
Vacuum chamber window
Standard quartz window
Radiation screen window
 Infrared absorption window
Vacuum degree
 5E-4 torr
Reserved interface 
2 probe arm interfaces&2 electrical interfaces
Radiation shielding material
Stainless steel
Cooling time
120 minutes to 5K
150 minutes to 5K
冷源
 GM refrigerator
Special vibration isolation table
 尺寸
800*800*800
900*900*800
桌推
 Fixed foot&滚轮

4K closed cycle low temperature probe station PSM-4K series of applications

semiconductor
Integrated circuit
wafer

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