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Liquid nitrogen probe PSM-LN2 series

Liquid nitrogen probe PSM-LN2 series

PSM-LN2 series liquid nitrogen high and low temperature probe can provide an 80K-800K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips,Through the external connection of different electrical measuring instruments,Can complete the integrated circuit voltage, current, resistance and IV curve and other parameters detection,For non-destructive electrical testing of chips, wafers and devices in low temperature vacuum environments。

Liquid nitrogen high and low temperature probe platform PSM-LN2 series product overview

  Liquid nitrogen high and low temperature probe station plays a vital role in scientific research and technology development。It can perform a variety of non-destructive physical and electrical properties tests on samples at low temperatures, helping researchers to deeply understand the various physical and electrical properties of materials or devices, so as to provide important data support for the development and application of new materials。


  PSM-LN2 series liquid nitrogen high and low temperature probe can provide an 80K-800K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips,Through the external connection of different electrical measuring instruments,Can complete the integrated circuit voltage, current, resistance and IV curve and other parameters detection,For non-destructive electrical testing of chips, wafers and devices in low temperature vacuum environments。


特点
• Liquid nitrogen high and low temperature vacuum probe table, cavity vacuum can reach 10E-4torr within 15 minutes, liquid nitrogen consumption is small, drop to temperature only 0.2L liquid nitrogen, easy to use and economical。
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different components on the sample to be switched for testing without destroying the vacuum。
• Unique probe arm X-Y-Z-R four-dimensional adjustment for 4-inch sample testing。
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test
• The probe arm adopts a triaxial connector with good leakage performance and measured leakage current less than 100fA@1V@80K--800K
• Wide test temperature range, support 80K-800K continuous temperature change。
• Uniquely designed flexible probe, which is mounted on copper shrapnel to avoid sample or electrode damage due to excessive force during needle insertion
• The top cover adopts clamshell structure, which makes changing sample more convenient。

Liquid nitrogen high and low temperature probe PSM-LN2 series technical parameters

Parameters and indicators:

Probe station host classification
型号PSM-LN2-2
PSM-LN2-2H
PSM-LN2-4
PSM-LN2-4H
Temperature range 
80K--500K
80K--800K
80K--500K 
80K--800K
Temperature control stability
+/-50mK
+/-100mk
+/-50mK
+/-100mk
Specimen holder
Types and materialsOxygen free copper ground gold plated sample holder
Anaerobic copper ground sample holder 
Anaerobic copper ground sample holder
Anaerobic copper ground sample holder 
尺寸2寸2寸4寸4寸
Optional specificationsInsulated sample holder (temperature only up to 400K)
Coaxial sample holder (temperature only up to 400K)
Triaxial sample holder (temperature only up to 400K)
Probe arm
类型Dc probe arm
数量4
Connectors and cables
Three coaxial connectors + very thin coaxial low-temperature cable
Leakage current100fA@1V In a vacuum
Signal frequency
 DC--50MHz
Matched impedance 
50欧姆
Displacement range
Z +/-6.5m R+/-10°
X+/- 50mm,Y+/- 12.5m 
X+/- 35mm,Y+/- 12.5m
Z +/-6.5m R+/-10°
Optical system
Microscope magnification
 10--180倍
Resolution
3微米
视场 
22mm
Working distance
 90--100mm
Vacuum chamber
材料Aluminium alloy
Cavity volume
 4L
 5.5L
Overall size
800*800*600
900*900*600
Intracavitary diameter
 124mm
155mm
Window size
 50mm
 100mm
Vacuum chamber window
Infrared absorption window
Radiation screen window 
N/AStandard quartz window
                 N/A
Standard quartz window
Vacuum degree
 5*10E-4 torr
Reserved interface
2 probe arm interfaces&2 electrical interfaces
Radiation shielding material
                  N/A
Stainless steel
                  N/A
Stainless steel
Liquid nitrogen chamber
Liquid nitrogen capacity
 0.5L
Cooling time
60 minutes to 80K
 80 minutes to 80K
Liquid nitrogen consumption
0.2L from room temperature to 80K
0.3L from room temperature to 80K
Liquid nitrogen retention time
 4 hours @80K
 3 hours @80K
Special vibration isolation table
尺寸
 800*800*800
 900*900*800
桌推
 Fixed foot&滚轮

Liquid nitrogen high and low temperature probe PSM-LN2 series applications

semiconductor
Integrated circuit
wafer

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